In this paper, we further improve the optical bandwidth of grating couplers, propose and experimentally validate a new and novel approach for wideband waveguide grating coupler design which can attain wideband coupling with unprecedented bandwidth of over 200 nm. Arrayed waveguide gratings (AWGs) are key optical components of various new applications in telecommunication, astronomy, medical imaging, and spec-troscopy. It is a very powerful integrated light dispersion technology with significant flexibility for tailoring its performance to the. With this slot waveguide grating structure, both the grating strength, mode effective index and dispersion in the grating region can be flexibly tuned to enable high coupling efficiency and wideband operation. 3D FDTD simulations predicted coupling efficiency of −4. High resolution fabrication processes realized four types of Si3N4 AWG devices: 8 channel × 200 GHz, 16 channel × 100 GHz, 16 channel × 50 GHz, and 16 channel ×.
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